Proof.
Because S/R is quasi-finite we may apply Theorem 10.123.12 to each point \mathfrak q of \mathop{\mathrm{Spec}}(S). Since \mathop{\mathrm{Spec}}(S) is quasi-compact, see Lemma 10.17.8, we may choose a finite number of g_ i \in S', i = 1, \ldots , n such that S'_{g_ i} = S_{g_ i}, and such that g_1, \ldots , g_ n generate the unit ideal in S (in other words the standard opens of \mathop{\mathrm{Spec}}(S) associated to g_1, \ldots , g_ n cover all of \mathop{\mathrm{Spec}}(S)).
Suppose that D(g) \subset \mathop{\mathrm{Spec}}(S') is contained in the image. Then D(g) \subset \bigcup D(g_ i). In other words, g_1, \ldots , g_ n generate the unit ideal of S'_ g. Note that S'_{gg_ i} \cong S_{gg_ i} by our choice of g_ i. Hence S'_ g \cong S_ g by Lemma 10.23.2.
We construct a finite algebra S'' \subset S' as in (3). To do this note that each S'_{g_ i} \cong S_{g_ i} is a finite type R-algebra. For each i pick some elements y_{ij} \in S' such that each S'_{g_ i} is generated as R-algebra by 1/g_ i and the elements y_{ij}. Then set S'' equal to the sub R-algebra of S' generated by all g_ i and all the y_{ij}. Details omitted.
\square
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