The Stacks project

Proof. Let $Y$ be an irreducible component of $X$. Write $Y = \bigcup _{i = 1, \ldots , n} (Y \cap X_ i)$ and note that each $Y \cap X_ i$ is closed in $Y$ since $X_ i$ is closed in $X$. By irreducibility of $Y$ we see that $Y$ is equal to one of the $Y \cap X_ i$, i.e., $Y \subset X_ i$. By maximality of irreducible components we get $Y = X_ i$.

Conversely, take one of the $X_ i$ and expand it to an irreducible component $Y$, which we have already shown is one of the $X_ j$. So $X_ i \subset X_ j$ and since the original union does not have redundant members, $X_ i = X_ j$, which is an irreducible component. $\square$