Proof.
Let S' \subset S be the integral closure of R in S. Let \mathfrak q' = S' \cap \mathfrak q. By Zariski's Main Theorem 10.123.12 there exists a g \in S', g \not\in \mathfrak q' such that S'_ g \cong S_ g. Consider the fibre rings F = S \otimes _ R \kappa (\mathfrak p) and F' = S' \otimes _ R \kappa (\mathfrak p). Denote \overline{\mathfrak q}' the prime of F' corresponding to \mathfrak q'. Since F' is integral over \kappa (\mathfrak p) we see that \overline{\mathfrak q}' is a closed point of \mathop{\mathrm{Spec}}(F'), see Lemma 10.36.19. Note that \mathfrak q defines an isolated closed point \overline{\mathfrak q} of \mathop{\mathrm{Spec}}(F) (see Definition 10.122.3). Since S'_ g \cong S_ g we have F'_ g \cong F_ g, so \overline{\mathfrak q} and \overline{\mathfrak q}' have isomorphic open neighbourhoods in \mathop{\mathrm{Spec}}(F) and \mathop{\mathrm{Spec}}(F'). We conclude the set \{ \overline{\mathfrak q}'\} \subset \mathop{\mathrm{Spec}}(F') is open. Combined with \mathfrak q' being closed (shown above) we conclude that \overline{\mathfrak q}' defines an isolated closed point of \mathop{\mathrm{Spec}}(F') as well.
An additional small remark is that under the map \mathop{\mathrm{Spec}}(F) \to \mathop{\mathrm{Spec}}(F') the point \overline{\mathfrak q} is the only point mapping to \overline{\mathfrak q}'. This follows from the discussion above.
By Lemma 10.24.3 we may write F' = F'_1 \times F'_2 with \mathop{\mathrm{Spec}}(F'_1) = \{ \overline{\mathfrak q}'\} . Since F' = S' \otimes _ R \kappa (\mathfrak p), there exists an s' \in S' which maps to the element (r, 0) \in F'_1 \times F'_2 = F' for some r \in R, r \not\in \mathfrak p. In fact, what we will use about s' is that it is an element of S', not contained in \mathfrak q', and contained in any other prime lying over \mathfrak p.
Let f(x) \in R[x] be a monic polynomial such that f(s') = 0. Denote \overline{f} \in \kappa (\mathfrak p)[x] the image. We can factor it as \overline{f} = x^ e \overline{h} where \overline{h}(0) \not= 0. After replacing f by x f if necessary, we may assume e \geq 1. By Lemma 10.143.13 we can find an étale ring extension R \to R', a prime \mathfrak p' lying over \mathfrak p, and a factorization f = h i in R'[x] such that \kappa (\mathfrak p) = \kappa (\mathfrak p'), \overline{h} = h \bmod \mathfrak p', x^ e = i \bmod \mathfrak p', and we can write a h + b i = 1 in R'[x] (for suitable a, b).
Consider the elements h(s'), i(s') \in R' \otimes _ R S'. By construction we have h(s')i(s') = f(s') = 0. On the other hand they generate the unit ideal since a(s')h(s') + b(s')i(s') = 1. Thus we see that R' \otimes _ R S' is the product of the localizations at these elements:
R' \otimes _ R S' = (R' \otimes _ R S')_{i(s')} \times (R' \otimes _ R S')_{h(s')} = S'_1 \times S'_2
Moreover this product decomposition is compatible with the product decomposition we found for the fibre ring F'; this comes from our choices of s', i, h which guarantee that \overline{\mathfrak q}' is the only prime of F' which does not contain the image of i(s') in F'. Here we use that the fibre ring of R'\otimes _ R S' over R' at \mathfrak p' is the same as F' due to the fact that \kappa (\mathfrak p) = \kappa (\mathfrak p'). It follows that S'_1 has exactly one prime, say \mathfrak r', lying over \mathfrak p' and that this prime lies over \mathfrak q'. Hence the element g \in S' maps to an element of S'_1 not contained in \mathfrak r'.
The base change R'\otimes _ R S inherits a similar product decomposition
R' \otimes _ R S = (R' \otimes _ R S)_{i(s')} \times (R' \otimes _ R S)_{h(s')} = S_1 \times S_2
It follows from the above that S_1 has exactly one prime, say \mathfrak r, lying over \mathfrak p' (consider the fibre ring as above), and that this prime lies over \mathfrak q.
Now we may apply Lemma 10.145.1 to the ring maps R' \to S'_1 \to S_1, the prime \mathfrak p' and the element g to see that after replacing R' by a principal localization we can assume that S_1 is finite over R' as desired.
\square
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